Paper information

Paper code

IAC-11,C2,5,7,x11629

Order

7

Room

TS-17

Title

Study on Properties of Silicon Oxycarbide Thin Films Prepared by RF Magnetron Sputtering Technology

abstract

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Session

5. Smart Materials and Adaptive Structures

symposium

C2. MATERIALS AND STRUCTURES SYMPOSIUM

congress

IAC-11

Type of presentation

oral

Main author

Dr. tao chen, Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, China

Co-authors

Dr. Duoshu Wang, Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, China;

Prof. Yuqing Xiong, Science and Technology on Surface Engineering Laboratory, Lanzhou Institute of Physics, China;